Radiation-enhanced diffusion effect in the ion beam synthesis of iron silicides

Radiation enhanced diffusion (RED) effect in silicide formation during ion implantation has been theoretically considered. The set of kinetic equations taking into account radiation acceleration of Fe atom diffusion was numerically solved. The sequential formation of different silicide phases and the threshold character of monosilicide nucleation within beta -FeSi2 grains were suggested. It was shown that RED strongly influences the phase composition of the implanted layer. The possibility of spatial separation of the phases on depth has been predicted. Calculated phase composition of implanted layer is in agreement with experimental data.