Plasma study and deposition of DLC/TiC/Ti multilayer structures using technique combining pulsed laser deposition and magnetron sputtering

被引：21

作者：

Bulír, J ^{[1
]}

Novotny, M ^{[1
]}

Jelínek, M ^{[1
]}

Kocourek, T ^{[1
]}

Studnicka, V ^{[1
]}

机构：

[1] Acad Sci Czech Republ, Inst Phys, Prague 18221 8, Czech Republic

来源：

SURFACE & COATINGS TECHNOLOGY | 2005年 / 200卷 / 1-4期

关键词：

pulsed laser deposition; magnetron; optical emission spectroscopy; X-ray diffraction; nanostructure;

D O I：

10.1016/j.surfcoat.2005.01.087

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We prepared nanostructured coatings composed of diamond-like carbon (DLC), titanium and titanium carbide using a new hybrid technique combining pulsed laser deposition (PLD) with magnetron sputtering. The whole deposition process was fully computer controlled. The coatings consist from a number of 1-20 nm-thick alternating particular layers forming in total 0.4 mu m-thick structure. A set of samples with different relative composition of Ti, TiC and DLC were prepared. Thin interlayer of titanium carbide was formed by simultaneous process of pulsed laser deposition (carbon) and magnetron sputtering (Ti). Microstructure was characterized by XRD. Mechanical properties were measured. The deposition process was investigated using an optical emission spectroscopy. The plasma was analyzed with a spatial and a time resolution. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：708 / 711

页数：4

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