Emission characteristics of metal-insulator-metal tunnel cathodes

被引：7

作者：

Adachi, H

机构：

[1] Muroran Institute of Technology, Muroran 050

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1996年 / 14卷 / 03期

关键词：

D O I：

10.1116/1.588877

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The tunnel cathode is one type of cold cathode. A very thin insulating film is sandwiched between two metal electrodes. The upper electrode is so thin that the electrons that tunnel through the insulating film can penetrate through it and emit to the vacuum. Emission characteristics are experimentally examined, especially the energy distribution of the emitted electrons and the emission uniformity over the active area. (C) 1996 American Vacuum Society.

引用

页码：2093 / 2095

页数：3

共 5 条

[1] ENERGY DISTRIBUTION OF ELECTRONS TUNNELING THROUGH A METAL-INSULATOR-METAL SANDWICH STRUCTURE [J].