Optical Properties and Elemental Composition of Ta2O5 Thin Films

被引：0

作者：

Guo Peitao ^{[1
]}

Xue Yiyu ^{[1
,2
]}

Huang Caihua ^{[1
,2
]}

Xia Zhilin ^{[2
]}

Zhang Guangyong ^{[2
]}

Fu Zhiwei ^{[2
]}

机构：

[1] Wuhan Univ Technol, Sch Automobile Engn, Wuhan 430070, Peoples R China

[2] Wuhan Univ Technol, Sch Mat Sci & Engn, Wuhan 430070, Peoples R China

来源：

2009 SYMPOSIUM ON PHOTONICS AND OPTOELECTRONICS (SOPO 2009) | 2009年

基金：

中国国家自然科学基金;

关键词：

Optical film; Tantalum oxide; Optical properties; XPS; TANTALUM OXIDE-FILMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The optical properties of tantalum oxide thin films fabricated by electron beam evaporation with ion assisted have been investigated. The as-deposited thin films are of good transmittance, of which the maxima is about 93%, close to that of the bare substrate; the refractive indexes are found to increase with the substrate temperature. The elemental composition and chemical bonding state in the as-deposited thin film has also been probed by X-ray photoelectron spectroscopy (XPS). The XPS results reveal that the main composition of the as-deposited film is mainly Ta2O5 with some TaOx and a little TaO, the O/Ta ratio is about 2.69 which is a bit higher than the stioichiometry of Ta2O5.

引用

页码：875 / +

页数：2

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