Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability

被引：6

作者：

Rissanen, Anna ^{[1
]}

Tappura, Kirsi ^{[1
]}

Laamanen, Mari ^{[1
]}

Puurunen, Riikka ^{[1
]}

Farm, Elina ^{[2
]}

Ritala, Mikko ^{[2
]}

Leskela, Markku ^{[2
]}

机构：

[1] VTT Tech Res Ctr Finland, Espoo, Finland

[2] Univ Helsinki, Dept Chem, Helsinki, Finland

来源：

2010 IEEE SENSORS | 2010年

关键词：

D O I：

10.1109/ICSENS.2010.5690769

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for improving MEMS in-use reliability. DDMS and ODS (n-octadecyltrimethoxysilane) SAM coatings were tested on surfaces with different pre-treatments and the quality of coatings was assessed through static water contact angle measurements and humidity exposure tests for both test membrane structures (100% stiction on uncoated structures vs. 17% stiction of DDMS SAM coated structures) and optical MEMS FPI components (0% stiction of DDMS SAM coated components). The obtained contact angle of the DDMS SAM coating was similar to 104 degrees. Both long term stability and thermal stability of the DDMS SAM coatings were found to be good.

引用

页码：767 / 770

页数：4

共 4 条

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