共 100 条
[53]
Progress in the industrial production of SiC substrates for semiconductor devices
[J].
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,
2001, 80 (1-3)
:327-331
[54]
High-quality SiC bulk single crystal growth based on simulation and experiment
[J].
SILICON CARBIDE AND RELATED MATERIALS 2003, PTS 1 AND 2,
2004, 457-460
:29-34
[56]
Growth of large high-quality SiC single crystals
[J].
JOURNAL OF CRYSTAL GROWTH,
2002, 237
:1180-1186
[59]
PVT-growth and characterization of single crystalline 3C-SiC on a (0001) 6H-SiC substrate
[J].
SILICON CARBIDE AND RELATED MATERIALS 2004,
2005, 483
:319-322