[1] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA
[2] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
[3] Photon Nano Meta Technol, Moscow 143026, Russia
[4] Moscow Inst Phys & Technol, Dolgoprudnyi 141700, Moscow Region, Russia
[5] Purdue Univ, W Lafayette, IN 47907 USA
[6] Russian Quantum Ctr, Skolkovo Innovat Ctr, Moscow 143025, Russia
[7] Heriot Watt Univ, Sch Engn & Phys Sci, Edinburgh EH14 4AS, Midlothian, Scotland
[8] Lebedev Phys Inst RAS, Moscow 119991, Russia