Electro-optical porous silicon gas sensor with enhanced selectivity

被引：31
作者：
Jalkanen, Tero [1 ]
Tuura, Jaani [1 ]
Makila, Ermei [1 ]
Salonen, Jarno [1 ,2 ]
机构：
[1] Univ Turku, Dept Phys & Astron, FI-20014 Turku, Finland
[2] Univ Turku, Ctr Mat & Surfaces, FI-20014 Turku, Finland
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2010年 / 147卷 / 01期
基金：
芬兰科学院;
关键词：
Porous silicon; Gas sensing; Interference filters; Selectivity; POROSITY; SURFACE; LAYER;
D O I：
10.1016/j.snb.2010.03.005
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A new type of gas sensor that enables simultaneous monitoring of the electrical and optical properties of the sensor structure has been developed. The sensor is based on a porous silicon (PS) optical interference filter layer, which was produced with an electrochemical etching process. This sensor structure provides a rapid response when subjected to ambient adsorbates. In addition, it offers an increased level of selectivity between different gases, thus addressing the unresolved problems related to PS gas sensing. Sensors with differing hygroscopic properties were produced, and their response to changes in relative humidity were tested. The sensors were also subjected to ethanol and dimethylformamide vapours, and their ability to differentiate between the studied gases was demonstrated. (c) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：100 / 104
页数：5
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