Time dynamics of burst-train filamentation assisted femtosecond laser machining in glasses

被引：61

作者：

Esser, Dagmar ^{[1
]}

Rezaei, Saeid ^{[2
]}

Li, Jianzhao ^{[2
]}

Herman, Peter R. ^{[2
]}

Gottmann, Jens ^{[1
]}

机构：

[1] Rhein Westfal TH Aachen, Lehrstuhl Lasertech, D-52074 Aachen, Germany

[2] Univ Toronto, Dept Elect & Comp Engn, Toronto, ON M5S 3G4, Canada

来源：

OPTICS EXPRESS | 2011年 / 19卷 / 25期

基金：

加拿大自然科学与工程研究理事会;

关键词：

FUSED-SILICA; TRANSPARENT MATERIALS; HEAT ACCUMULATION; PULSES; PROPAGATION; FS; FABRICATION; ABLATION;

D O I：

10.1364/OE.19.025632

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Bursts of femtosecond laser pulses with a repetition rate of f = 38.5MHz were created using a purpose-built optical resonator. Single Ti:Sapphire laser pulses, trapped inside a resonator and released into controllable burst profiles by computer generated trigger delays to a fast Pockels cell switch, drove filamentation-assisted laser machining of high aspect ratio holes deep into transparent glasses. The time dynamics of the hole formation and ablation plume physics on 2-ns to 400-ms time scales were examined in time-resolved side-view images recorded with an intensified-CCD camera during the laser machining process. Transient effects of photoluminescence and ablation plume emissions confirm the build-up of heat accumulation effects during the burst train, the formation of laser-generated filaments and plume-shielding effects inside the deeply etched vias. The small time interval between the pulses in the present burst train enabled a more gentle modification in the laser interaction volume that mitigated shock-induced microcracks compared with single pulses. (C) 2011 Optical Society of America

引用

页码：25632 / 25642

页数：11

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