Mechanical and tribological characterization of a thermally actuated MEMS cantilever

被引：13

作者：

Pustan, Marius ^{[1
]}

Rochus, Veronique ^{[2
]}

Golinval, Jean-Claude ^{[3
]}

机构：

[1] Tech Univ Cluj Napoca, Cluj Napoca, Romania

[2] IMEC, B-3001 Louvain, Belgium

[3] Univ Liege, LTAS Liege, B-4000 Liege, Belgium

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2012年 / 18卷 / 03期

关键词：

FRICTION; NANOSCALE; DYNAMICS; DESIGN;

D O I：

10.1007/s00542-011-1423-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The temperature effect on the mechanical and tribological behaviors of a microelectromechanical systems cantilever is experimentally investigated using an atomic force microscope. A nonlinear variation of the bending stiffness of microcantilevers as a function of temperature is determined. The variation of the adhesion force between the tip of atomic force microscope (AFM) probe (Si3N4) and the microcantilever fabricated in gold is monitored at different temperatures. Using the lateral mode operation of atomic force microscope, the influence of temperature on friction coefficient between the tip of AFM probe and microcantilever is presented. Finite element analysis is used to estimate the thermal field distribution in microcantilever and the axial expansion.

引用

页码：247 / 256

页数：10

共 23 条

[1] A scale-dependent model for multi-asperity contact and friction [J].