Silicon microring resonators

被引：2024

作者：

Bogaerts, Wim ^{[1
]}

De Heyn, Peter ^{[1
]}

Van Vaerenbergh, Thomas ^{[1
]}

De Vos, Katrien ^{[1
]}

Selvaraja, Shankar Kumar ^{[1
]}

Claes, Tom ^{[1
]}

Dumon, Pieter ^{[1
]}

Bienstman, Peter ^{[1
]}

Van Thourhout, Dries ^{[1
,2
,3
]}

Baets, Roel ^{[1
,4
,5
]}

机构：

[1] Ghent Univ Imec, Photon Res Grp, Dept Informat Technol, Ghent, Belgium

[2] Bell Labs, Murray Hill, NJ USA

[3] State Ghent Univ, Dept Informat Technol INTEC, Ghent, Belgium

[4] Delft Univ Technol, Delft, Netherlands

[5] Tech Univ Eindhoven, Eindhoven, Netherlands

来源：

LASER & PHOTONICS REVIEWS | 2012年 / 6卷 / 01期

关键词：

Silicon photonics; ring resonator; STIMULATED RAMAN-SCATTERING; INSULATOR WAVE-GUIDE; CONCAVE GRATING DEMULTIPLEXER; GROUP-VELOCITY DISPERSION; SELF-PHASE-MODULATION; PHOTONIC WIRE; RING RESONATORS; OPTICAL MODULATION; LOW-POWER; WAVELENGTH CONVERSION;

D O I：

10.1002/lpor.201100017

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An overview is presented of the current state-of-the-art in silicon nanophotonic ring resonators. Basic theory of ring resonators is discussed, and applied to the peculiarities of submicron silicon photonic wire waveguides: the small dimensions and tight bend radii, sensitivity to perturbations and the boundary conditions of the fabrication processes. Theory is compared to quantitative measurements. Finally, several of the more promising applications of silicon ring resonators are discussed: filters and optical delay lines, label-free biosensors, and active rings for efficient modulators and even light sources.

引用

页码：47 / 73

页数：27

共 188 条

[1] Pattern based prediction for plasma etch [J].