A newly developed three-dimensional profile scanner with nanometer spatial resolution

被引：23

作者：

Shinno, H. ^{[1
]}

Yoshioka, H. ^{[1
]}

Gokan, T. ^{[1
]}

Sawano, H. ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Yokohama, Kanagawa 227, Japan

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2010年 / 59卷 / 01期

基金：

日本学术振兴会;

关键词：

Control; Measuring machine; Probe; SYSTEM;

D O I：

10.1016/j.cirp.2010.03.022

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Demands for characterization of three dimensional (3D) micro-geometries and surface topographies over a large area have recently increased in many industries. This paper presents a newly developed 3D profile measuring machine with a nanometer spatial resolution. The machine developed is composed of an active vibration isolating system, a planar nano-motion table system driven by voice coil motors, a vertical nano-motion platform driven by a hybrid actuator, and a probing system based on the scanning tunneling microscopy principle. Performance evaluation results confirm that the machine can be successfully conducted the characterization of micro-geometries and surface topographies. (C) 2010 CIRP.

引用

页码：525 / 528

页数：4

共 11 条

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