A new structure of silicon-on-insulator metal-oxide- semiconductor field effect transistor to suppress the floating body effect

被引:8
作者
Zhu, M [1 ]
Lin, Q [1 ]
Zhang, ZX [1 ]
Lin, CL [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Microsyst & INformat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
关键词
D O I
10.1088/0256-307X/20/5/350
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Considering that the silicon-on-insulator (SOI) devices have an inherent floating body effect, which may cause substantial influences in the performance of SOI device and circuit, we propose a novel device structure to suppress the floating body effect. In the new structure there is a buried p(+) region under the n(+) source and that region is extended to outside of the source, and this additional p(+) region provides a path for accumulated holes to flow out of the body. Numerical simulations were carried out with Medici, and the output characteristics and gate characteristics were compared with those of conventional SOI counterparts. The simulated results show the suppression of floating body effect in the novel SOI device as expected.
引用
收藏
页码:767 / 769
页数:3
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