Clean and less defective transfer of monolayer graphene by floatation in hot water

被引:22
作者
Kim, Ji-Weon [1 ]
Woo, Ju Yeon [2 ]
Jo, Sunghwan [1 ]
Oh, Jun Ho [2 ]
Hong, Woonggi [3 ]
Lee, Byung Chul [4 ]
Jung, Hyun-June [5 ]
Kim, Jae-Hyun [6 ]
Roh, Sung-Cheoul [7 ]
Han, Chang-Soo [1 ,2 ]
机构
[1] Korea Univ, Dept Micro Nano Syst, Seoul 02841, South Korea
[2] Korea Univ, Dept Mech Engn, Seoul 02841, South Korea
[3] Korea Adv Inst Sci & Technol, Sch Elect Engn, Graphene 2D Mat Res Ctr, Daejeon 34141, South Korea
[4] Korea Univ, Sch Elect Engn, Seoul 02841, South Korea
[5] CAMM, Daejeon 34103, South Korea
[6] KIMM, Dept Nanomech, Daejeon 34103, South Korea
[7] Yonsei Univ, Sch Environm Engn, Wonju 220710, Kangwon, South Korea
基金
新加坡国家研究基金会;
关键词
Monolayer graphene; Transfer; Hot water; Floating; Less defective; FIELD-EFFECT TRANSISTORS; CONTACT RESISTANCE; CVD GRAPHENE; COPPER; OXIDATION; PERFORMANCE; FABRICATION; EVOLUTION; MOBILITY; GROWTH;
D O I
10.1016/j.apsusc.2019.145057
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Monolayer graphene grown by chemical vapor deposition has been intensively studied for applications such as transparent conductive films, electronic devices, sensors, molecular barriers, and electrodes. However, technology to transfer monolayer graphene from metal film must be improved through environmentally friendly and non-defective methods on arbitrary target substrates. Here, we report a clean and direct method for transferring monolayer graphene from Cu foil without defects and over a large area. In a water bath at 90-95 degrees C, we floated Cu foil with graphene on the water surface. After 5 h, a Cu2O layer formed uniformly at the interface between the graphene and the Cu. Subsequently, the monolayer graphene on the Cu foil was delaminated from the thermal release tape, releasing the graphene to the target substrate (SiO2/Si and PET). The Cu2O formation and defect changes were monitored at each step via various characterization methods. The Cu2O layer was uniformly established and no defects were generated after the transfer. Finally, we fabricated a graphene field effect transistor that exhibited an excellent electronic performance.
引用
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页数:9
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