PIEZOELECTRIC MEMS DEFORMABLE MIRRORS WITH HIGH-DENSITY ACTUATOR ARRAY

被引：0

作者：

Sato, M. ^{[1
]}

Kanno, I. ^{[1
]}

Kotera, H. ^{[1
]}

Tabata, O. ^{[1
]}

机构：

[1] Kyoto Univ, Dept Micro Engn, Kyoto, Japan

来源：

2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2011年

关键词：

ADAPTIVE OPTICS; THIN-FILMS; SILICON;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We fabricated piezoelectric MEMS deformable mirror (DM) with high-density actuator array for adaptive optics to realize low-voltage and high-resolution retinal imaging. 61-element actuator array composed of lead zirconate titanate (PZT) thin film was deposited on the mirror diaphragm, and the diaphragm was deformed by applying control voltage onto the individual actuator through lead lines prepared on a polyimide insulating layer with through holes. The deformation characteristics of the fabricated DM were measured with a laser Doppler vibrometer, and independent application of a voltage on the individual actuator was confirmed. We also confirmed relatively large stroke of 0.23 mu m under low-voltage of 20 V without displacement hysteresis.

引用

收藏

页码：1265 / 1268

页数：4

相关论文

共 12 条

[1] Large-stroke MEMS deformable mirrors for adaptive optics [J].

Dagel, Daryl J. ;

Cowan, William D. ;

Spahn, Olga Blum ;

Grossetete, Grant D. ;

Grine, Alejandro J. ;

Shaw, Michael J. ;

Resnick, Paul J. ;

Jokiel, Bernhard, Jr. .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (03) :572-583

[2] Comparative analysis of deformable mirrors for ocular adaptive optics [J].

Dalimier, E ;

Dainty, C .

OPTICS EXPRESS, 2005, 13 (11) :4275-4285

[3] REAL-TIME ATMOSPHERIC COMPENSATION [J].

HARDY, JW ;

LEFEBVRE, JE ;

KOLIOPOULOS, CL .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1977, 67 (03) :360-369

[4] Measurement of transverse piezoelectric properties of PZT thin films [J].

Kanno, I ;

Kotera, H ;

Wasa, K .

SENSORS AND ACTUATORS A-PHYSICAL, 2003, 107 (01) :68-74

[5] Development of deformable mirror composed of piezoelectric thin films for adaptive optics [J].

Kanno, Isaku ;

Kunisawa, Takaaki ;

Suzuki, Takaaki ;

Kotera, Hidetoshi .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2007, 13 (02) :155-161

[6]

Khanna D. N., 2003, POLYM ADVAN TECHNOL, V4, p[234, 2003], DOI DOI 10.1002/PAT.1993.220040403

[7] Supernormal vision and high-resolution retinal imaging through adaptive optics [J].

Liang, JZ ;

Williams, DR ;

Miller, DT .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1997, 14 (11) :2884-2892

[8] Decoupling algorithm of a double-layer bimorph deformable mirror: analysis and experimental test [J].

Ning, Yu ;

Chen, Bo ;

Yu, Hao ;

Zhou, Hong ;

Yang, Huafeng ;

Guan, Chunlin ;

Rao, Changhui ;

Jiang, Wenhan .

APPLIED OPTICS, 2009, 48 (17) :3154-3159

[9] Adaptive optic correction using microelectromechanical deformable mirrors [J].

Perreault, JA ;

Bifano, TG ;

Levine, BM ;

Horenstein, MN .

OPTICAL ENGINEERING, 2002, 41 (03) :561-566

[10] Process-induced strain in silicon-on-insulator materials [J].

Tiberj, A ;

Fraisse, B ;

Blanc, C ;

Contreras, S ;

Camassel, J .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2002, 14 (48) :13411-13416