Two-stage wrinkling of Al films deposited on polymer substrates

被引：24

作者：

Wu, K. ^{[1
]}

Yuan, H. Z. ^{[1
]}

Li, S. J. ^{[1
]}

Zhang, J. Y. ^{[1
]}

Liu, G. ^{[1
]}

Sun, J. ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Shaanxi, Peoples R China

来源：

SCRIPTA MATERIALIA | 2019年 / 162卷

基金：

中国国家自然科学基金; 中国博士后科学基金;

关键词：

Thin films; Wrinkling; Hierarchical structures; THIN-FILMS; SURFACE PATTERNS; METAL-FILMS; MECHANICS; MICRO;

D O I：

10.1016/j.scriptamat.2018.12.016

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This study reveals two-stage wrinkling behavior of Al films deposited on polydimethylsiloxane (PDMS) substrates by magnetron sputtering at a high temperature. The hierarchical structures with nano-micro dual scale wrinkles were created in Al films. The micro-scale wrinkles originated from thermal contraction, with the wavelength increasing with increasing film thickness, while nano-scale wrinkles, with an almost unchanged wavelength, are induced by the expansion of the mixed layer on the PDMS surface. The results provide a facile method to produce the hierarchical wrinkled surfaces for functionality. (C) 2018 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

引用

页码：456 / 459

页数：4

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