Two-stage wrinkling of Al films deposited on polymer substrates

被引：23
作者：
Wu, K. [1 ]
Yuan, H. Z. [1 ]
Li, S. J. [1 ]
Zhang, J. Y. [1 ]
Liu, G. [1 ]
Sun, J. [1 ]
机构：
[1] Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Shaanxi, Peoples R China
来源：
SCRIPTA MATERIALIA | 2019年 / 162卷
基金：
中国博士后科学基金; 中国国家自然科学基金;
关键词：
Thin films; Wrinkling; Hierarchical structures; THIN-FILMS; SURFACE PATTERNS; METAL-FILMS; MECHANICS; MICRO;
D O I：
10.1016/j.scriptamat.2018.12.016
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This study reveals two-stage wrinkling behavior of Al films deposited on polydimethylsiloxane (PDMS) substrates by magnetron sputtering at a high temperature. The hierarchical structures with nano-micro dual scale wrinkles were created in Al films. The micro-scale wrinkles originated from thermal contraction, with the wavelength increasing with increasing film thickness, while nano-scale wrinkles, with an almost unchanged wavelength, are induced by the expansion of the mixed layer on the PDMS surface. The results provide a facile method to produce the hierarchical wrinkled surfaces for functionality. (C) 2018 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：456 / 459
页数：4
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