Impact of substrate temperature on the properties of yttrium oxide thin films prepared by nebulizer spray pyrolysis technique

In this study, the yttrium oxide (Y2O3) thin films were prepared at different substrate temperatures (Tsub) 300 degrees C, 350 degrees C, 400 degrees C, 450 degrees C, and 500 degrees C by nebulizer spray pyrolysis technique. Structural studies confirm the formation of Y2O3 in the cubic phase. The trap rock structure was obtained from the SEM micrograph. It was observed that the yttrium oxide thin films show better particle growth at higher substrate temperatures. XRD results reveal that the crystalline nature of the Y2O3 thin films increased with the increasing of substrate temperatures, and the SEM morphology grain size will decrease in higher temperatures, which is good agreement with the XRD results. The optical bandgap varied from 2.58 to 3.6 eV among an increased substrate temperature from 350 degrees C to 500 degrees C. The recorded photoluminance spectra of Y2O3 thin films exhibit a sharp and broad emission at 310 nm and 466 nm. (c) 2019 Elsevier Ltd. All rights reserved. Selection and peer-review under responsibility of the scientific committee of the International Conference On Impact Of Innovations In Science And Technology For Societal Development: Materials Science.