Effect of methane concentration on size of charged clusters in the hot filament diamond CVD process

被引：60

作者：

Jeon, ID

Park, CJ

Kim, DY

Hwang, NM

机构：

[1] Seoul Natl Univ, Sch Mat Sci & Engn, Ctr Microstruct Sci Mat, Seoul 151742, South Korea

[2] Korea Res Inst Stand & Sci, Daedok Sci Town 305600, Daejon, South Korea

来源：

JOURNAL OF CRYSTAL GROWTH | 2001年 / 223卷 / 1-2期

关键词：

growth models; chemical vapor deposition processes; polycrystalline deposition; diamond; dielectric materials;

D O I：

10.1016/S0022-0248(00)01016-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Negatively charged clusters of 3000-18 000 atomic mass units, which had been predicted by the charged cluster model, were experimentally confirmed under typical process conditions of hot-filament diamond CVD using gas mixtures of 1-5% CH4 and H-2. The cluster size increased with increasing methane concentration. Under conditions for the generation of small clusters containing a few hundred carbon atoms, high-quality diamond films were deposited while under conditions for the generation of larger clusters (> similar to 1000 atoms), a cauliflower structure was obtained. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：6 / 14

页数：9

共 37 条

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