A high-sensitivity hydrogen gas sensor based on carbon nanotubes fabricated on SiO2 substrate

被引:14
作者
Al-Diabat, Ahmad M. [1 ]
Algadri, Natheer A. [2 ]
Ahmed, Naser M. [3 ]
Abuelsamen, Abdulsalam [4 ]
Bidier, Shaker A. [3 ]
机构
[1] Al Zaytoonah Univ Jordan, Dept Phys, Amman, Jordan
[2] Isra Univ, Dept Phys, Amman, Jordan
[3] Univ Sains Malaysia, Sch Phys, George Town, Malaysia
[4] Aqaba Univ Technol, Med Imaging & Radiog Dept, Aqaba, Jordan
关键词
Carbon nanotube; gas sensor; hydrogen; high sensitive; dielectrophoretic; PALLADIUM; PERFORMANCE; FILMS;
D O I
10.1080/20550324.2021.1977063
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this study, an inexpensive simple method for the fabrication of efficient hydrogen (H-2) gas sensor based on carbon nanotubes (CNTs) was presented. The CNTs were synthesized using microwave oven and deposited onto SiO2 substrate by a dielectrophoretic method. The as-grown CNTs showed an n-type behavior because CNTs possess the characters of both metallic and semiconductor when placed between the two electrodes, meanwhile, the current was directed mostly by metallic tubes. Upon exposure to H-2 gas at room temperature, the CNTs exhibited high sensitivity up to 315% at 140 ppm H-2, and relatively good sensitivity of 40% at a very low H-2 gas concentration of 20 ppm. To the best of our knowledge, this is the first work involving the fabrication of CNTs for detecting a low H-2 gas concentration of 20 ppm at RT with high sensitivity comparing with other previous studies. [GRAPHICS]
引用
收藏
页码:172 / 183
页数:12
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