Theoretical simulation and experimental verification of dynamic caustic manipulation using a deformable mirror for laser material processing

被引：2

作者：

Smarra, Marco ^{[1
]}

Gurevich, Evgeny L. ^{[2
]}

Ostendorf, Andreas ^{[1
]}

机构：

[1] Ruhr Univ Bochum, Fac Mech Engn, Chair Appl Laser Technol, Univ Str 150, D-44801 Bochum, Germany

[2] FH Munster, Laserzentrum, Stegerwaldstr 39, D-48565 Steinfurt, Germany

来源：

OPTICS AND LASER TECHNOLOGY | 2022年 / 149卷

关键词：

Laser beam shaping; Laser material processing; Deformable mirror; Laser ablation process; Picosecond laser; Laser drilling; UNIMORPH; ABLATION;

D O I：

10.1016/j.optlastec.2021.107814

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The influence of a deformable mirror on spatial light modulation in ultrafast lasers processing is demonstrated. The deformable mirror was integrated into an optical setup which contains an additional lens for generating a nearly linear focus shift in the focal plane behind the f-theta lens. The deformation of the mirror surface can be described by the Zernike terms Defocus, Astigmatism, and a combination of both, resulting in a cylindric lens behavior. The influence of the mirror surface deformation in this optical setup on the intensity distribution in the focal plane was simulated. From the simulation results, the caustic in the focal plane was calculated. The simulation results were compared to experiments using a picosecond laser with a maximum pulse energy of about 60 mu J. We demonstrate that the initial astigmatism of the raw beam can be reduced using the deformable mirror. A linear focus shift (R-2 = 98.7%) and the generation of elliptical/ line intensity distributions are shown. Line intensity distribution was used to demonstrate slit drilling application in thin metal foils.

引用

页数：10

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