Practice-oriented evaluation of the uncertainty of measurements with white-light interferometer

Measurements are the objective base for decisions in industry. For correct decision making the quality of the measured data is essential. Practical procedures for the determination of measurement uncertainty in micro- and nanotechnologies according to the rather abstract ISO guide to the expression of uncertainty in measurement (GUM) have not been stated up to now. In contrast to GUM capability analysis shows the advantage of giving practical and concrete instructions. In this article a measurement uncertainty analysis based on the capability analysis is shown at the example of step height measurements with white-light interferometry.