A highly smart MEMS acetone gas sensors in array for diet-monitoring applications

被引：10

作者：

Lee, Jae Eun ^{[1
,2
]}

Lim, Chan Kyu ^{[3
]}

Song, Hyunjoon ^{[3
]}

Choi, Sung-Yool ^{[2
]}

Lee, Dae-Sik ^{[1
]}

机构：

[1] Elect & Telecommun Res Inst, Welf & Med ICT Res Dept, Diagnost & Therapeut Syst Res Sect, Daejeon 34129, South Korea

[2] Korea Adv Inst Sci & Technol, Sch Elect Engn, 291 Daehak Ro, Daejeon 34141, South Korea

[3] Korea Adv Inst Sci & Technol, Sch Chem, 291 Daehak Ro, Daejeon 34141, South Korea

来源：

MICRO AND NANO SYSTEMS LETTERS | 2021年 / 9卷 / 01期

基金：

新加坡国家研究基金会;

关键词：

Acetone; MEMS heater; CuO-based sensor array; Pattern recognition; Diet monitoring; PCA; BREATH ANALYSIS;

D O I：

10.1186/s40486-021-00136-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In the present work, gas sensor arrays consisted of four different sensing materials based on CuO and their depositions on the MEMS microheaters were designed, fabricated and characterized. The sensor array is consisted with CuO, CuO with Pt NPs, ZnO-CuO and ZnO-CuO with Au NPs and their gas sensing properties are characterized for detection of exhaled breath-related VOCs. Through MEMS microheaters, power consumption is considered for application to healthcare devices which requires ultrasensitive acetone gas sensitivity. Also, using the principal component analysis, it enables to discriminate acetone gas, a biomarker for fat burning during diet, with other VOCs gases. The device would be applicable for on-site diet monitoring in the field of mobile healthcare.

引用

页数：6

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