Growth and study of Tb3+ doped Nb2O5 thin films by radiofrequency magnetron sputtering: Photoluminescence properties

被引:14
|
作者
Horcholle, Bryan [1 ]
Labbe, Christophe [1 ]
Portier, Xavier [1 ]
Marie, Philippe [1 ]
Frilay, Cedric [1 ]
Yuan, Weiqiang [2 ]
Jadwisienczak, Wojciech [2 ]
Ingram, David [3 ]
Grygiel, Clara [1 ]
Cardin, Julien [1 ]
机构
[1] Normandie Univ, CIMAP, ENSICAEN, UNICAEN,CEA,CNRS, 6 Blvd Marechal Juin, F-14050 Caen 4, France
[2] Ohio Univ, Sch Elect Engn & Comp Sci, Athens, OH 45701 USA
[3] Ohio Univ, Dept Phys & Astron, Athens, OH 45701 USA
关键词
Niobium; Rare Earth Doping; Terbium; Magnetron Sputtering; Luminescence; Optical Materials; OPTICAL-PROPERTIES; ELECTRONIC POLARIZABILITIES; ELECTROCHROMIC PROPERTIES; SILICON OXYNITRIDE; NIOBIUM PENTOXIDE; RAMAN-SPECTRA; TEMPERATURE; MORPHOLOGY; IONS;
D O I
10.1016/j.apsusc.2022.153711
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Undoped and doped Nb2O5 thin films were successfully deposited on silicon wafer by sputtering technique from high purity Nb2O5 and Tb4O7 targets and annealed by rapid thermal annealing between 400 degrees C and 900 degrees C. Chemical and structural investigations of undoped and Tb-doped Nb2O5 films were made, leading to the determination of stoichiometry and identification of phase transformations with increasing annealing temperature and Tb3+ ion content. The optical properties' analysis (spectrophotometry UV-Vis-NIR, spectroscopic ellipsometry) of those undoped and doped Nb2O5 films led us to the determination of refractive index and electronic properties evolution with annealing temperature and Tb3+ ion content. The structural evolution was confirmed by analysis of Raman spectra of undoped and doped Nb2O5 films. The photoluminescence properties of Tb3+ ion-doped Nb2O5 thin films were also studied. The correlation between the photoluminescence of Tb3+ ion and the electronic properties of the Nb2O5 host matrix is highlighted. The relationship between the structural modifications, the electronic properties of the host matrix, and the photoluminescence of Tb3+ ion is established.
引用
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页数:15
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