Comprehensive study of the electronic and optical behavior of highly degenerate p-type Mg-doped GaN and AlGaN

被引:58
作者
Gunning, Brendan P. [1 ]
Fabien, Chloe A. M. [1 ]
Merola, Joseph J. [1 ]
Clinton, Evan A. [1 ]
Doolittle, W. Alan [1 ]
Wang, Shuo [2 ]
Fischer, Alec M. [2 ]
Ponce, Fernando A. [2 ]
机构
[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
[2] Arizona State Univ, Dept Phys, Tempe, AZ 85287 USA
基金
美国国家科学基金会;
关键词
MOLECULAR-BEAM EPITAXY; 2-DIMENSIONAL ELECTRON; GROWTH-CONDITIONS; HOLE GAS; CONDUCTION; FILMS; ALN; GAN(0001);
D O I
10.1063/1.4906464
中图分类号
O59 [应用物理学];
学科分类号
摘要
The bulk and 2-dimensional (2D) electrical transport properties of heavily Mg-doped p-type GaN films grown on AlN buffer layers by Metal Modulated Epitaxy are explored. Distinctions are made between three primary p-type conduction mechanisms: traditional valence band conduction, impurity band conduction, and 2D conduction within a 2D hole gas at a hetero-interface. The bulk and 2D contributions to the overall carrier transport are identified and the relative contributions are found to vary strongly with growth conditions. Films grown with III/V ratio less than 1.5 exhibit high hole concentrations exceeding 2 x 10(19) cm(-3) with effective acceptor activation energies of 51 meV. Films with III/V ratios greater than 1.5 exhibit lower overall hole concentrations and significant contributions from 2D transport at the hetero-interface. Films grown with III/V ratio of 1.2 and Mg concentrations exceeding 2 x 10(20) cm(-3) show no detectable inversion domains or Mg precipitation. Highly Mg-doped p-GaN and p-AlGaN with Al fractions up to 27% similarly exhibit hole concentrations exceeding 2 x 10(19) cm(-3). The p-GaN and p-Al0.11Ga0.89N films show broad ultraviolet (UV) photoluminescence peaks, which intercept the valence band, supporting the presence of a Mg acceptor band. Finally, a multi-quantum-well light-emitting diode (LED) and p-i-n diode are grown, both of which demonstrate rectifying behavior with turn-on voltages of 3-3.5V and series resistances of 6-10 Omega without the need for any post-metallization annealing. The LED exhibits violet-blue luminescence at 425 nm, while the p-i-n diode shows UV luminescence at 381 nm, and both devices still show substantial light emission even when submerged in liquid nitrogen at 77 K. (C) 2015 AIP Publishing LLC.
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页数:11
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