Noise characteristics of ZnO-nanowire photodetectors prepared on ZnO: Ga/glass templates

被引:17
作者
Lu, Chien-Yuan [1 ]
Chang, Sheng-Po
Chang, Shoou-Jinn
Chiou, Yu-Zung
Kuo, Che-Fu
Chang, Hong-Ming
Hsu, Cheng-Liang
Chen, I-Cherng
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Dept Elect Engn, Tainan 70101, Taiwan
[3] So Taiwan Univ Technol, Dept Elect Engn, Tainan 71005, Taiwan
[4] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan
[5] Ind Technol Res Inst S, Micro Syst Technol Ctr, Tainan 709, Taiwan
关键词
detectivity; nanowires; noise equivalent power (NEP); quantum efficiency; vapor-liquid-solid (VLS); ZnO;
D O I
10.1109/JSEN.2007.896567
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we report the fabrication of vertically well-aligned ZnO nanowire ultraviolet (UV) photodetectors on ZnO:Ga/glass templates. With 1 V applied bias, it was found that dark current density of the device was only 1.37 x 10(-7) A/cm(2). It was also found that UV-to-visible rejection ratio of the fabricated photodetector was around 1000 with a maximum quantum efficiency of 12.6%. It was also found that noise equivalent power and normalized detectivity of the ZnO nanowire photodetector were 5.73 x 10(-11) W and 6.17 x 10(9) cmHz(0.5) W-1, respectively.
引用
收藏
页码:1020 / 1024
页数:5
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