Behaviour of a planar Langmuir probe in a laser ablation plasma

We have investigated some aspects of the behaviour of planar Langmuir probes in the supersonic plasma flow produced by laser ablation of solid materials in vacuum. The ablation was done using a 26 ns, 248 nm excimer laser, irradiating a silver target at 1 J cm(-2). We have compared the behaviour of the probe when it is orientated perpendicular and parallel to the plasma flow. In particular, we have shown that it is possible to adapt an analytical model, developed for plasma immersion ion implantation, to quantitatively describe the variation of the ion current with probe bias for the case when the plasma flow is along the probe surface. The electron temperature was also measured. (c) 2005 Elsevier B.V. All rights reserved.