Behaviour of a planar Langmuir probe in a laser ablation plasma

被引:21
作者
Doggett, B [1 ]
Budtz-Joergensen, C
Lunney, JG
Sheerin, P
Turner, MM
机构
[1] Trinity Coll Dublin, Dept Phys, Dublin, Ireland
[2] Dublin City Univ, Sch Phys Sci, Dublin 9, Ireland
[3] Dublin City Univ, Natl Ctr Plasma Sci & Technol, Dublin 9, Ireland
关键词
laser ablation plasma; excimer laser; plasma immersion ion implantation;
D O I
10.1016/j.apsusc.2005.01.035
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have investigated some aspects of the behaviour of planar Langmuir probes in the supersonic plasma flow produced by laser ablation of solid materials in vacuum. The ablation was done using a 26 ns, 248 nm excimer laser, irradiating a silver target at 1 J cm(-2). We have compared the behaviour of the probe when it is orientated perpendicular and parallel to the plasma flow. In particular, we have shown that it is possible to adapt an analytical model, developed for plasma immersion ion implantation, to quantitatively describe the variation of the ion current with probe bias for the case when the plasma flow is along the probe surface. The electron temperature was also measured. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:134 / 138
页数:5
相关论文
共 7 条
[1]  
Geohegan D.B., 1994, PULSED LASER DEPOSIT, P115
[2]   Angle-resolved energy distributions of laser ablated silver ions in vacuum [J].
Hansen, TN ;
Schou, J ;
Lunney, JG .
APPLIED PHYSICS LETTERS, 1998, 72 (15) :1829-1831
[3]   Relaxation of a collisionless ion matrix sheath [J].
Israel, D ;
Riemann, KU ;
Tsendin, L .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (09) :4565-4574
[5]  
LIBERMAN MA, 1989, J APPL PHYS, V66, P2926
[6]   Angular distribution of electron temperature and density in a laser-ablation plume [J].
Toftmann, B ;
Schou, J ;
Hansen, TN ;
Lunney, JG .
PHYSICAL REVIEW LETTERS, 2000, 84 (17) :3998-4001
[7]   The Langmuir probe as a diagnostic of the electron component within low temperature laser ablated plasma plumes [J].
Weaver, I ;
Martin, GW ;
Graham, WG ;
Morrow, T ;
Lewis, CLS .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (03) :1801-1805