Sol-gel processing of ferroelectric PbTiO3 and Pb(Zr0.5Ti0.5)O3 thin films

被引：10

作者：

Kumar, V ^{[1
]}

Ohya, Y

Takahashi, Y

机构：

[1] Dept Elect, Sci Soc, Ctr Mat Elect Technol, Trissur, Kerala, India

[2] Gifu Univ, Fac Engn, Dept Appl Chem, Gifu 50111, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 08期

关键词：

sol-gel; ferroelectric thin films; lead titanate; PZT; ITO bottom electrode;

D O I：

10.1143/JJAP.37.4477

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ferroelectric thin films of PbTiO3 and Pb(Zr0.5Ti0.5)O-3 were deposited using a sol-gel process from a highly stable precursor solution derived from a unique and simple system consisting of basic lead acetate; titanium and zirconium butoxides. This new system simplifies the chemical processing of precursor solutions of lead titanate-based materials. By adjusting the concentration of the precursor solution and using the dip-coating technique, homogeneous thin films of PbTiO3 and Pb(Zr0.5Ti0.5)O-3 were deposited onto glass, conducting glass and single crystal MgO(100) and SrTiO3(100) substrates. The thin-films were characterized by X-ray diffraction (XRD) and transmission electron microscopy (TEM). P-E hysteresis of these films revealed their ferroelectric nature. The effect of indium-tin-oxide (ITO) bottom electrode on the microstructure of PZT thin films in the PZT/ITO/glass substrate structure is also reported.

引用

页码：4477 / 4481

页数：5

共 29 条

[1] EPITAXIAL LEAD-ZIRCONATE-TITANATE THIN-FILMS ON SAPPHIRE [J].

BRAUN, W ;

KWAK, BS ;

ERBIL, A ;

BUDAI, JD ;

WILKENS, BJ .

APPLIED PHYSICS LETTERS, 1993, 63 (04) :467-469

[2]

Budd K. D., 1985, British Ceramic Proceedings, P107

[3] PREPARATION OF ORIENTED PBTIO3 THIN-FILMS USING A SPIN-ON SOL-GEL PROCESS [J].

CARPER, MD ;

PHULE, PP .

APPLIED PHYSICS LETTERS, 1993, 63 (02) :153-155

[4] ION-BEAM DEPOSITION OF THIN-FILMS OF FERROELECTRIC LEAD ZIRCONATE TITANATE (PZT) [J].

CASTELLANO, RN ;

FEINSTEIN, LG .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (06) :4406-4411

[5]

DEKLEVA TW, 1988, J AM CERAM SOC, V71, pC280

[6] HYDROLYSIS OF TITANIUM ALKOXIDES - MODIFICATION OF THE MOLECULAR PRECURSOR BY ACETIC-ACID [J].

DOEUFF, S ;

HENRY, M ;

SANCHEZ, C ;

LIVAGE, J .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 89 (1-2) :206-216

[7] HIGHLY TEXTURED PBTIO3 THIN-FILMS THROUGH A SOL-GEL PROCESS [J].

GUZMAN, G ;

BARBOUX, P ;

PERRIERE, J .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (02) :635-640

[8]

HAERTLING GH, 1992, CERAM T, V25, P1

[9] PREPARATION OF C-AXIS ORIENTED PBTIO3 THIN-FILMS AND THEIR CRYSTALLOGRAPHIC, DIELECTRIC, AND PYROELECTRIC PROPERTIES [J].

IIJIMA, K ;

TOMITA, Y ;

TAKAYAMA, R ;

UEDA, I .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (01) :361-367

[10]

JAFFE B, 1971, PIEZOELECTRIC CERAMI, P115, DOI DOI 10.1111/J.1151-2916.1958.TB12903.X

← 1 2 3 →