On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems

In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a single layer (one-dimensional) OPA prototype for one-dimensional beam steering on silicon nanomembrane is presented. The authors present different approaches, such as nanoimprint lithography, optical lithography, and self-aligned patterning of multibonded silicon-on-insulator wafers, for the realization of 3D OPA devices in particular and 3D photonic circuits in general. At the end, the authors discuss the challenges and potential solutions. (C) 2010 American Vacuum Society. [DOI:10.1116/1.3511508]