Morphology Evolution of Monolayer MoS2 Flakes with Seed Promotor Grown by CVD

被引：0

作者：

Zhang, Xin ^{[1
]}

Zhao, HongBin ^{[1
]}

Zhang, QingZhu ^{[1
,2
]}

Wei, Feng ^{[1
]}

机构：

[1] Gen Res Inst Nonferrous Met, State Key Lab Adv Mat Smart Sensing, Beijing, Peoples R China

[2] Chinese Acad Sci, Key Lab Microelect Devices Integrated Technol, Inst Microelect, Beijing, Peoples R China

来源：

ADVANCED FUNCTIONAL MATERIALS (CMC 2017) | 2018年

关键词：

Molybdenum disulfide; CVD growth; Seed promotor Monolayer; PHASE GROWTH; VAPOR; CRYSTALS;

D O I：

10.1007/978-981-13-0110-0_45

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report a developed preparation process on the monolayer MoS2 which was grown on SiO2/Si substrates with seed promotor by atmospheric-pressure chemical vapor deposition (CVD) method. It is indicated that growth temperature and proportion of precursors play significant roles on the morphology of the monolayer MoS2 which can change from three-point star to triangle and hexagon. The dimension of the MoS2 flake is mainly dependent on the growth temperature, while its morphology is mainly influenced by the amount of the loaded MoO3. Raman spectra and AFM images show that the MoS2 flakes of the three morphologies are all monolayer.

引用

页码：399 / 405

页数：7

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