SINGLE-STRUCTURE 3-AXIS LORENTZ FORCE MAGNETOMETER WITH SUB-30 nT/√HZ RESOLUTION

被引：0
|
作者：
Li, Mo [1 ]
Ng, Eldwin J. [2 ]
Hong, Vu A. [2 ]
Ahn, Chae H. [2 ]
Yang, Yushi [2 ]
机构：
[1] Univ Calif Davis, Davis, CA 95616 USA
[2] Stanford Univ, Stanford, CA 94305 USA
来源：
2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2014年
关键词：
COMPASS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work demonstrates a 3-axis Lorentz force magnetometer for electronic compass purposes. The magnetometer measures magnetic flux in 3 axes using a single structure. With 1 mW power consumption, the sensor achieves sub-30 nT/root Hz resolution in each of the 3 axes. Compared to the 3-axis Hall sensors currently used in smartphones, the 3-axis magnetometer shown here has the advantages of 10x lower noise floor and the ability to be co-fabricated with MEMS inertial sensors.
引用
收藏
页码：80 / 83
页数：4
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