High-Q aluminum nitride Lamb wave resonators with biconvex edges

被引：87

作者：

Lin, Chih-Ming ^{[1
,2
]}

Lai, Yun-Ju ^{[1
,2
]}

Hsu, Jin-Chen ^{[3
]}

Chen, Yung-Yu ^{[4
]}

Senesky, Debbie G. ^{[1
,2
]}

Pisano, Albert P. ^{[1
,2
]}

机构：

[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

[3] Natl Yunlin Univ Sci & Technol, Dept Mech Engn, Yunlin 64002, Taiwan

[4] Tatung Univ, Dept Mech Engn, Taipei 10452, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 14期

关键词：

aluminium compounds; finite element analysis; III-V semiconductors; Q-factor; surface acoustic wave resonators; wide band gap semiconductors;

D O I：

10.1063/1.3643153

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A Lamb wave resonator utilizing an aluminum nitride (AlN) plate with biconvex edges to enhance the quality factor (Q) is demonstrated. The simulation results based on finite element analysis verify that the use of the biconvex edges, instead of the conventional flat edges, can efficiently confine mechanical energy in the AlN Lamb wave resonator. Specifically, the measured frequency response of a 491.8-MHz AlN Lamb wave resonator with biconvex edges yields a Q of 3280 which represents a 2.6x enhancement in Q over a 517.9-MHz Lamb wave resonator on the same AlN plate but with the suspended flat edges. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3643153]

引用

页数：3

共 50 条

[31] APPLY HIGH-Q RESONATORS TO MM-WAVE MICROSTRIP.
Dydyk, Michael
Microwaves New York, N.Y., 1980, 19 (13): : 62 - 63
[32] Quasi-planar high-Q millimeter-wave resonators
Vanhille, Kenneth J.
Fontaine, Daniel L.
Nichols, Christopher
Filipovic, Dejan S.
Popovic, Zoya
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2006, 54 (06) : 2439 - 2446
[33] Aluminum nitride-on-sapphire platform for integrated high-Q microresonators
Liu, Xianwen
Sun, Changzheng
Xiong, Bing
Wang, Lai
Wang, Jian
Han, Yanjun
Hao, Zhibiao
Li, Hongtao
Luo, Yi
Yan, Jianchang
Wei, Tongbo
Zhang, Yun
Wang, Junxi
OPTICS EXPRESS, 2017, 25 (02): : 587 - 594
[34] Novel high-Q combline resonators
Shen, G
Budimir, D
APMC 2001: ASIA-PACIFIC MICROWAVE CONFERENCE, VOLS 1-3, PROCEEDINGS, 2001, : 1108 - 1110
[35] HIGH-Q DISK DIELECTRIC RESONATORS
IVANOV, EN
MUKHTAROV, IN
TSARAPKIN, DP
RADIOTEKHNIKA I ELEKTRONIKA, 1983, 28 (08): : 1658 - 1659
[36] Two Dimensional, High Electromechanical Coupling Aluminium Nitride Lamb Wave Resonators
Luke, Samuel Pei Hao
Sun, Chengliang
Zhu, Yao
Wang, Nan
Gu, Yuandong Alex
PROCEEDINGS OF THE 2015 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC), 2015, : 733 - 735
[37] Design and fabrication of aluminum nitride Lamb wave resonators towards high figure of merit for intermediate frequency filter applications
Liang, Ji
Zhang, Hongxiang
Zhang, Daihua
Duan, Xuexin
Zhang, Hao
Pang, Wei
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (03)
[38] Lamb Wave Dispersion in Gallium Nitride Micromechanical Resonators
Zhu, Haoshen
Ansari, Azadeh
Rais-Zadeh, Mina
2016 COMPOUND SEMICONDUCTOR WEEK (CSW) INCLUDES 28TH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE & RELATED MATERIALS (IPRM) & 43RD INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS (ISCS), 2016,
[39] Intrinsic Temperature Compensation of Aluminum Nitride Lamb Wave Resonators for Multiple-Frequency References
Kuypers, Jan H.
Lin, Chih-Ming
Vigevani, Gabriele
Pisano, Albert P.
2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2, 2008, : 240 - 249
[40] Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films
Montague, J. R.
Dalberth, M.
Gray, J. M.
Seghete, D.
Bertness, K. A.
George, S. M.
Bright, V. M.
Rogers, C. T.
Sanford, N. A.
SENSORS AND ACTUATORS A-PHYSICAL, 2011, 165 (01) : 59 - 65

← 1 2 3 4 5 →