High-Q aluminum nitride Lamb wave resonators with biconvex edges

被引：87

作者：

Lin, Chih-Ming ^{[1
,2
]}

Lai, Yun-Ju ^{[1
,2
]}

Hsu, Jin-Chen ^{[3
]}

Chen, Yung-Yu ^{[4
]}

Senesky, Debbie G. ^{[1
,2
]}

Pisano, Albert P. ^{[1
,2
]}

机构：

[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

[3] Natl Yunlin Univ Sci & Technol, Dept Mech Engn, Yunlin 64002, Taiwan

[4] Tatung Univ, Dept Mech Engn, Taipei 10452, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 14期

关键词：

aluminium compounds; finite element analysis; III-V semiconductors; Q-factor; surface acoustic wave resonators; wide band gap semiconductors;

D O I：

10.1063/1.3643153

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A Lamb wave resonator utilizing an aluminum nitride (AlN) plate with biconvex edges to enhance the quality factor (Q) is demonstrated. The simulation results based on finite element analysis verify that the use of the biconvex edges, instead of the conventional flat edges, can efficiently confine mechanical energy in the AlN Lamb wave resonator. Specifically, the measured frequency response of a 491.8-MHz AlN Lamb wave resonator with biconvex edges yields a Q of 3280 which represents a 2.6x enhancement in Q over a 517.9-MHz Lamb wave resonator on the same AlN plate but with the suspended flat edges. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3643153]

引用

页数：3

共 50 条

[21] High-Q Silicon Nitride Few-Mode Microdisk Resonators
Chen, Yuan
Fan, Zhiqiang
Yang, Yang
Lin, Yue
Jiang, Di
Li, Xiang
Qiu, Qi
IEEE PHOTONICS TECHNOLOGY LETTERS, 2024, 36 (03) : 179 - 182
[22] RF-Designed High-Power Lamb-Wave Aluminum-Nitride Resonators
Campanella, Humberto
Narducci, Margarita
Wang, Nan
Soon, Jeffrey Bo Woon
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2015, 63 (02) : 331 - 339
[23] TUNING OF HIGH-Q WAVE-GUIDE-DIELECTRIC RESONATORS
VELIKOTSKIY, VN
DVADNENKO, VY
EKIMOV, SV
YURCHENKO, YP
YARMAK, IN
TELECOMMUNICATIONS AND RADIO ENGINEERING, 1988, 43 (07) : 131 - 133
[24] High-Q GRIN Resonators
Armani, A. M.
Soltani, S.
Choi, H.
Diep, V.
Kovach, A.
Kuo, K.
LASER RESONATORS, MICRORESONATORS, AND BEAM CONTROL XVIII, 2016, 9727
[25] High-Q aluminum nitride photonic crystal nanobeam cavities
Pernice, W. H. P.
Xiong, C.
Schuck, C.
Tang, H. X.
APPLIED PHYSICS LETTERS, 2012, 100 (09)
[26] APPLY HIGH-Q RESONATORS TO MM-WAVE MICROSTRIP
DYDYK, M
MICROWAVES, 1980, 19 (13): : 62 - 63
[27] Microwave and millimeter-wave high-Q micromachined resonators
Brown, AR
Blondy, P
Rebeiz, GM
INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 1999, 9 (04) : 326 - 337
[28] Four-wave mixing in high-Q tellurium-oxide-coated silicon nitride microring resonators
Kiani, Khadijeh Miarabbas
Mbonde, Hamidu M.
Frankis, Henry C.
Mateman, Richard
Leinse, Arne
Knights, Andrlw P.
Bradley, Jonathan D. B.
OSA CONTINUUM, 2020, 3 (12) : 3497 - 3507
[29] Apodization Technique for Effective Spurious Mode Suppression of Aluminum Nitride Lamb Wave Resonators
Zhu, Yao
Wang, Nan
Chua, Geng Li
Chen, Bangtao
Srinivas, Merugu
Singh, Navab
Gu, Yuandong
2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2018,
[30] High-Q tellurium-oxide-coated silicon nitride microring resonators
Frankis, Henry C.
Kiani, Khadijeh Miarabbas
Su, Daniel
Mateman, Richard
Leinse, Arne
Bradley, Jonathan D. B.
OPTICS LETTERS, 2019, 44 (01) : 118 - 121

← 1 2 3 4 5 →