High-Q aluminum nitride Lamb wave resonators with biconvex edges

被引：87

作者：

Lin, Chih-Ming ^{[1
,2
]}

Lai, Yun-Ju ^{[1
,2
]}

Hsu, Jin-Chen ^{[3
]}

Chen, Yung-Yu ^{[4
]}

Senesky, Debbie G. ^{[1
,2
]}

Pisano, Albert P. ^{[1
,2
]}

机构：

[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

[3] Natl Yunlin Univ Sci & Technol, Dept Mech Engn, Yunlin 64002, Taiwan

[4] Tatung Univ, Dept Mech Engn, Taipei 10452, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 14期

关键词：

aluminium compounds; finite element analysis; III-V semiconductors; Q-factor; surface acoustic wave resonators; wide band gap semiconductors;

D O I：

10.1063/1.3643153

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A Lamb wave resonator utilizing an aluminum nitride (AlN) plate with biconvex edges to enhance the quality factor (Q) is demonstrated. The simulation results based on finite element analysis verify that the use of the biconvex edges, instead of the conventional flat edges, can efficiently confine mechanical energy in the AlN Lamb wave resonator. Specifically, the measured frequency response of a 491.8-MHz AlN Lamb wave resonator with biconvex edges yields a Q of 3280 which represents a 2.6x enhancement in Q over a 517.9-MHz Lamb wave resonator on the same AlN plate but with the suspended flat edges. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3643153]

引用

页数：3

共 50 条

[1] High-Q Butterfly-Shaped AlN Lamb Wave Resonators
Zou, Jie
Lin, Chih-Ming
Tang, Gongbin
Pisano, Albert P.
IEEE ELECTRON DEVICE LETTERS, 2017, 38 (12) : 1739 - 1742
[2] HIGH-Q CAPACITIVE-PIEZOELECTRIC ALN LAMB WAVE RESONATORS
Yen, Ting-Ta
Pisano, Albert P.
Nguyen, Clark T. -C.
26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 2013, : 114 - 117
[3] High-Q X Band Aluminum Nitride Combined Overtone Resonators
Chen, Guofeng
Rinaldi, Matteo
PROCEEDINGS OF THE 2019 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EUROPEAN FREQUENCY AND TIME FORUM (EFTF-IFCS 2019), 2019,
[4] Thermal Compensation for Aluminum Nitride Lamb Wave Resonators Operating at High Temperature
Lin, Chih-Ming
Yen, Ting-Ta
Felmetsger, Valery V.
Hopcroft, Matthew A.
Kuypers, Jan H.
Pisano, Albert P.
2010 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2010, : 14 - 18
[5] Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications
Lin, Chih-Ming
Yen, Ting-Ta
Felmetsger, Valery V.
Hopcroft, Matthew A.
Kuypers, Jan H.
Pisano, Albert P.
APPLIED PHYSICS LETTERS, 2010, 97 (08)
[6] High-Q Piezoelectric Lamb Wave Resonators based on AlN Plates with Chamfered Corners
Lin, Chih-Ming
Zou, Jie
Chen, Yung-Yu
Pisano, Albert P.
2015 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2015,
[7] High-Q Resonators on Single Crystal Aluminum Nitride Grown by Molecular Beam Epitaxy
Sun, Yi
Laleyan, David
Reid, Eric
Wang, Ping
Liu, Xianhe
Pandey, Ayush
Soltani, Mohammad
Mi, Zetian
2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2019,
[8] Temperature-Compensated Aluminum Nitride Lamb Wave Resonators
Lin, Chih-Ming
Yen, Ting-Ta
Lai, Yun-Ju
Felmetsger, Valery V.
Hopcroft, Matthew A.
Kuypers, Jan H.
Pisano, Albert P.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2010, 57 (03) : 524 - 532
[9] Aluminum Nitride Lamb Wave Resonators with High Figure of Merit for Narrowband Filter Applications
Liang, Ji
Zhang, Hongxiang
Xie, Heng
Pang, Wei
Zhang, Daihua
Zhang, Hao
2014 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2014, : 114 - 117
[10] Fine Frequency Selection Techniques for Aluminum Nitride Lamb Wave Resonators
Yen, Ting-Ta
Lin, Chih-Ming
Lai, Yun-Ju
Wittwer, Damien
Hopcroft, Matthew A.
Pisano, Albert P.
2010 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2010, : 9 - 13

← 1 2 3 4 5 →