High-Q aluminum nitride Lamb wave resonators with biconvex edges

被引：87

作者：

Lin, Chih-Ming ^{[1
,2
]}

Lai, Yun-Ju ^{[1
,2
]}

Hsu, Jin-Chen ^{[3
]}

Chen, Yung-Yu ^{[4
]}

Senesky, Debbie G. ^{[1
,2
]}

Pisano, Albert P. ^{[1
,2
]}

机构：

[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

[3] Natl Yunlin Univ Sci & Technol, Dept Mech Engn, Yunlin 64002, Taiwan

[4] Tatung Univ, Dept Mech Engn, Taipei 10452, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 14期

关键词：

aluminium compounds; finite element analysis; III-V semiconductors; Q-factor; surface acoustic wave resonators; wide band gap semiconductors;

D O I：

10.1063/1.3643153

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A Lamb wave resonator utilizing an aluminum nitride (AlN) plate with biconvex edges to enhance the quality factor (Q) is demonstrated. The simulation results based on finite element analysis verify that the use of the biconvex edges, instead of the conventional flat edges, can efficiently confine mechanical energy in the AlN Lamb wave resonator. Specifically, the measured frequency response of a 491.8-MHz AlN Lamb wave resonator with biconvex edges yields a Q of 3280 which represents a 2.6x enhancement in Q over a 517.9-MHz Lamb wave resonator on the same AlN plate but with the suspended flat edges. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3643153]

引用

页数：3

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