Analysis of the self-assembling and the defect annihilation processes in DSA using meso-scale simulation

被引：1

作者：

Morita, Hiroshi ^{[1
]}

Norizoe, Yuki ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Nanosyst Res Inst, Tsukuba, Ibaraki 3058568, Japan

来源：

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXII | 2015年 / 9425卷

关键词：

Meso scale simulation; Dissipative particle dynamics method; Dynamics of polymer chain; Defect annihilation; OCTA; COPOLYMERS;

D O I：

10.1117/12.2085650

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Recently, directed self-assembly (DSA) method is focused on as a next generation lithography technique. We performed the DPD simulations to analyze the self-assembling process of block copolymer in DSA using OCTA (in detail, see http://octa.jp) system. Using DPD simulation, we can obtain the phase separated structures at each moment consisted by block copolymer chains. As those structures are consisted by polymer chains, an analysis can be done on those structures. In this paper, we study the dynamics of end particles in the defect annihilation process to understand the dynamics of self-assembling of block copolymer in DSA. From our analysis, the end particles moves in advance than the change of domain structure in the defect annihilation process.

引用

页数：8

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