Planar Microstrip Ring Resonators for Microwave-Based Gas Sensing: Design Aspects and Initial Transducers for Humidity and Ammonia Sensing

被引：64

作者：

Bogner, Andreas ^{[1
]}

Steiner, Carsten ^{[1
]}

Walter, Stefanie ^{[1
]}

Kita, Jaroslaw ^{[1
]}

Hagen, Gunter ^{[1
]}

Moos, Ralf ^{[1
]}

机构：

[1] Univ Bayreuth, Dept Funct Mat, D-95447 Bayreuth, Germany

来源：

SENSORS | 2017年 / 17卷 / 10期

关键词：

microwave cavity perturbation; resonant frequency; radio frequency based gas sensors; zeolites; in operando spectroscopy; DIELECTRIC-PROPERTIES; MOISTURE SENSOR; ZEOLITES; STATE; NH3; CATALYSTS; FILM;

D O I：

10.3390/s17102422

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A planar microstrip ring resonator structure on alumina was developed using the commercial FEM software COMSOL. Design parameters were evaluated, eventually leading to an optimized design of a miniaturized microwave gas sensor. The sensor was covered with a zeolite film. The device was successfully operated at around 8.5 GHz at room temperature as a humidity sensor. In the next step, an additional planar heater will be included on the reverse side of the resonator structure to allow for testing of gas-sensitive materials under sensor conditions.

引用

页数：14

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