Measurement of atmospheric pressure microplasma jet with Langmuir probes

A radio frequency argon microplasma jet at atmospheric-pressure is characterized using Langmuir probes. While optical methods are the typical diagnostic for these small scale plasmas, the simplicity and low cost of Langmuir probes makes them an attractive option. The plasma density and electron temperature are measured using existing high-pressure Langmuir probe theories developed for flames and arcs. The density and temperature vary from 1 x 10(16) to 1 x 10(19) m(-3) and 2.3 to 4.4 eV, respectively, depending on the operating condition. The density decreases while the electron temperature increases with axial distance from the jet exit. The applicability of the probe theories as well as the effect of collisionality and jet mixing is discussed. (C) 2016 American Vacuum Society.