Optical properties of silica antireflective films formed in sol-gel processes

被引：9
|
作者：
Jaglarz, Janusz [1 ]
Karasinski, Pawel [2 ]
Skoczek, Edyta [1 ]
机构：
[1] Cracow Univ Technol, Inst Phys, Ul Podchorazych 1, PL-30084 Krakow, Poland
[2] Silesian Tech Univ, Dept Optoelect, PL-44100 Gliwice, Poland
来源：
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 8, NO 9 | 2011年 / 8卷 / 09期
关键词：
antireflective coatings; porous silica; sol-gel; ellipsometry;
D O I：
10.1002/pssc.201084128
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The work presents optical properties of sol-gel derived porous silica films of low refractive index, from 1.2 to 1.3. Due to low refractive index, the porous silica films can be applied to reduce the light reflection coefficient. This allows porous silica films as good candidates for the antireflective coatings (ARC) production. The spectroscopic ellipsometric measurements have been performed for the refractive indices and thickness of silica films determination. ((C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
引用
收藏
页码：2645 / 2648
页数：4
相关论文
共 50 条
  • [21] Preparation of Antireflective Silica Coating by the Sol-Gel Method for Heliothermic Power Plants
    da Silva, Debora Guimaraes
    Costa, Vilma Conceicao
    Xavier Nunes, Rogerio Antonio
    MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS, 2018, 21 (03):
  • [22] Optical properties of Coumarin 314 doped sol-gel silica rods
    Choi, DW
    Lim, CW
    Sohn, SH
    OPTIK, 2003, 114 (08): : 347 - 350
  • [23] Optical characterization of Er-implanted ZnO films formed by sol-gel method
    Fukudome, T
    Kaminaka, A
    Isshiki, H
    Saito, R
    Yugo, S
    Kimura, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 206 : 287 - 290
  • [24] Influence of aging and annealing on the properties of silica films produced with sol-gel method
    Karasinski, Pawel
    OPTICA APPLICATA, 2006, 36 (2-3) : 389 - 399
  • [25] Sensitive films based on porous sol-gel silica
    Karasinski, P.
    Tyszkiewicz, C.
    Szponik, M.
    Rogozinski, R.
    OPTICAL FIBERS AND THEIR APPLICATIONS 2014, 2014, 9228
  • [26] Sol-gel nanocrystalline ZnO:Ag films: Structural and optical properties
    Ivanova, T.
    Harizanova, A.
    Koutzarova, T.
    Vertruyen, B.
    SUPERLATTICES AND MICROSTRUCTURES, 2014, 70 : 1 - 6
  • [27] Study of optical properties of some sol-gel derived films of ZnO
    Bandyopadhyay, S
    Paul, GK
    Sen, SK
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2002, 71 (01) : 103 - 113
  • [28] Optical properties of ZnO thin films prepared by sol-gel process
    Petersen, J.
    Brimont, C.
    Gallart, M.
    Cregut, O.
    Schmerber, G.
    Gilliot, P.
    Hoenerlage, B.
    Ulhaq-Bouillet, C.
    Rehspringer, J. L.
    Leuvrey, C.
    Colis, S.
    Slaoui, A.
    Dinia, A.
    MICROELECTRONICS JOURNAL, 2009, 40 (02) : 239 - 241
  • [29] Structural, optical and electrical properties of ZnO films by sol-gel method
    Lu, CZ
    Cho, JY
    Chang, HJ
    Joo, SW
    Wang, YS
    DESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2, 2004, 449-4 : 1009 - 1012
  • [30] Optical Properties of ZnO thin films prepared by Sol-gel method
    Khelladi, Nesrine Bouchenak
    Sari, Nasr Eddine Chabane
    2014 NORTH AFRICAN WORKSHOP ON DIELECTRIC MATERIALS FOR PHOTOVOLTAIC SYSTEMS (NAWDMPV), 2014,
12345