The structural and photoluminescence character of InAs quantum dots grown on a combined InAlAs and GaAs strained buffer

被引:0
作者
Shi, GX [1 ]
Xu, B [1 ]
Jin, P [1 ]
Ye, XL [1 ]
Cui, CX [1 ]
Zhang, CL [1 ]
Wu, J [1 ]
Wang, ZG [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
来源
PRICM 5: THE FIFTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-5 | 2005年 / 475-479卷
关键词
quantum dots; strain buffer layer; InAs; photoluminescence;
D O I
10.4028/www.scientific.net/MSF.475-479.1791
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The structural and photoluminescence (PL) properties of the InAs quantum dots (QDs) grown on a combined InAlAs and GaAs strained buffer layer have been investigated by AFM and PL measurements. The dependence of the critical thickness for the transition from 2D to 3D on the thickness of GaAs layer is demonstrated directly by RHEED. The effects of the introduced-InAlAs layer on the density and the aspect ratio of QDs have been discussed.
引用
收藏
页码:1791 / 1794
页数:4
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