共 36 条
Microwave cavity-enhanced transduction for plug and play nanomechanics at room temperature
被引:68
作者:

Faust, T.
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h-index: 0
机构:
Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany
Univ Munich, Fak Phys, D-80539 Munich, Germany Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany

Krenn, P.
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机构:
Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany
Univ Munich, Fak Phys, D-80539 Munich, Germany Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany

Manus, S.
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h-index: 0
机构:
Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany
Univ Munich, Fak Phys, D-80539 Munich, Germany Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany

Kotthaus, J. P.
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Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany
Univ Munich, Fak Phys, D-80539 Munich, Germany Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany

Weig, E. M.
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Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany
Univ Munich, Fak Phys, D-80539 Munich, Germany Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany
机构:
[1] Univ Munich, Ctr NanoSci CeNS, D-80539 Munich, Germany
[2] Univ Munich, Fak Phys, D-80539 Munich, Germany
关键词:
QUANTUM GROUND-STATE;
MECHANICAL RESONATOR;
RADIATION-PRESSURE;
SILICON-NITRIDE;
OSCILLATOR;
MOTION;
MICROMIRROR;
D O I:
10.1038/ncomms1723
中图分类号:
O [数理科学和化学];
P [天文学、地球科学];
Q [生物科学];
N [自然科学总论];
学科分类号:
07 ;
0710 ;
09 ;
摘要:
Following recent insights into energy storage and loss mechanisms in nanoelectromechanical systems (NEMS), nanomechanical resonators with increasingly high quality factors are possible. Consequently, efficient, non-dissipative transduction schemes are required to avoid the dominating influence of coupling losses. Here we present an integrated NEMS transducer based on a microwave cavity dielectrically coupled to an array of doubly clamped pre-stressed silicon nitride beam resonators. This cavity-enhanced detection scheme allows resolving of the resonators' Brownian motion at room temperature while preserving their high mechanical quality factor of 290,000 at 6.6 M MHz. Furthermore, our approach constitutes an 'opto'-mechanical system in which backaction effects of the microwave field are employed to alter the effective damping of the resonators. In particular, cavity-pumped self-oscillation yields a linewidth of only 5 Hz. Thereby, an adjustement-free, all-integrated and self-driven nanoelectromechanical resonator array interfaced by just two microwave connectors is realised, which is potentially useful for applications in sensing and signal processing.
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