Nanoscale Origami for 3D Optics

被引:158
作者
Cho, Jeong-Hyun [1 ]
Keung, Michael D. [1 ]
Verellen, Niels [2 ,3 ]
Lagae, Liesbet [2 ,3 ]
Moshchalkov, Victor V. [3 ]
Van Dorpe, Pol [2 ]
Gracias, David H. [1 ,4 ]
机构
[1] Johns Hopkins Univ, Dept Chem & Biomol Engn, Baltimore, MD 21218 USA
[2] IMEC, B-3001 Louvain, Belgium
[3] Katholieke Univ Leuven, INPAC, Dept Phys & Astron, B-3001 Louvain, Belgium
[4] Johns Hopkins Univ, Dept Chem, Baltimore, MD 21218 USA
基金
美国国家科学基金会;
关键词
NANOSTRUCTURES; FABRICATION;
D O I
10.1002/smll.201100568
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Nanoscale self-folding of electron-beam lithography patterned templates is used to create 3D devices for optics and biosensing. © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:1943 / 1948
页数:6
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