The influence of the ion irradiation by 30 keV Ga+ ions on the crystal structure, chemical ordering, magnetic properties, and topography of epitaxial Fe/Cr/Fe trilayers was investigated by different analytical techniques. We present direct experimental evidence, supported by theoretical estimates, that two processes take place concurrently due to the Ga-ion implantation. (i) A complete atom mixing of the Cr atoms within the Fe multilayers is occurring due to the collision cascades during the ballistic regime, and (ii) an essentially complete recovery of the initial single-crystal quality of the Fe multilayers by healing the melted and damaged area through the thermal spike phase occurs. Based on the experimental range distributions and theoretical modeling, channeling of Ga+ ions in the experiments is found to contribute weakly to ion penetration and stopping, and the relative fraction of the well-channeled ions is marginally small. On the other hand, this weak channeling is sufficient to reduce the sputter yield by a factor of more than 5 in comparison with the sputtering of polycrystalline samples, evidence for the fact that the magnitude of channeling is not of primary importance for the sputtering. We offer an explanation for the observation of dramatic and abrupt changes in the surface roughness with increasing fluences in terms of a transformation from a single-phase single-crystal implanted region (bcc-Fe) to a mixture of the polycrystalline alpha-Fe-like bcc and alpha-Fe3Ga structures within the outer half of the original Fe/Cr/Fe trilayer at fluences above 6.25 x 10(16) ion/cm(2). The wall-like elevations appearing at the boundary of the irradiated areas were analyzed experimentally by varying the irradiation conditions. We showed that the wall size is governed by the ion-current density applied. A physical explanation for the appearance of such topographic features is presented, which would be valid for any material irradiated by a focused ion beam.
