Aluminum-doped zinc oxide nanorods and methyl alcohol gas sensor application

被引：14

作者：

Liu, Yi-Hsing ^{[1
,2
]}

Chang, Shoou-Jinn ^{[1
,2
]}

Lai, Lin-Tzu ^{[1
,2
]}

Tu, Yung-Ping ^{[3
]}

Young, Sheng-Joue ^{[3
]}

机构：

[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan

[2] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan

[3] Natl Formosa Univ, Dept Elect Engn, Huwei Township 632, Yunlin, Taiwan

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2022年 / 28卷 / 01期

关键词：

ZNO THIN-FILMS; SENSING PROPERTIES; ENHANCEMENT; PERFORMANCE; HYDROGEN;

D O I：

10.1007/s00542-020-04856-z

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we mainly discuss about Al-doped zinc oxide (ZnO) nanorods (NRs) grown by hydrothermal method with low temperature. Glass substrate was grown 100 nm ZnO seed layer by RF magnetron Sputter. Add zinc nitrate hexahydrate [Zn(NO3)(2)center dot 6H(2)O] and hexamethylenetetramine (HMT, C6H12N4), and add aluminum nitrate [Al(NO3)(3)center dot 9H(2)O] for changing conductive properties of ZnO NRs to reach the purpose of doped. Then we used field electron emission scanning electron microscope observing the surface morphology; energy dispersive spectrometer analyze element content; X-ray diffractometer; photoluminescence analyze optical properties; transmission electron microscopy view the internal type and structure of the material. Finally observing the Al-doped ZnO NRs and pure ZnO NRs sensor under methyl alcohol surroundings. The results the Al-doped ZnO NRs sensor were found to be more sensitive than the pure ZnO NRs sensor under methyl alcohol surroundings.

引用

页码：377 / 382

页数：6

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