Comprehensive study of the structural, optical and electrical properties of InAlAs: Mg films lattice matched to InP grown by MOVPE

被引:2
作者
Ezzedini, M. [1 ,2 ]
Bouzidi, M. [3 ]
Qaid, M. M. [2 ,4 ]
Chine, Z. [3 ]
Rebey, A. [3 ]
Sfaxi, L. [1 ,5 ]
机构
[1] Monastir Univ, Lab Microoptoelect & Nanostruct, Monastir, Tunisia
[2] KACST Intel Consortium, CENA, Riyadh, Saudi Arabia
[3] Univ Monastir, Fac Sci, URHEA, Monastir 5000, Tunisia
[4] Taiz Univ, Dept Phys, Taizi, Yemen
[5] Sousse Univ, High Sch Sci & Technol Hammam Sousse, Sousse, Tunisia
关键词
MOLECULAR-BEAM EPITAXY; CHEMICAL-VAPOR-DEPOSITION; MOCVD; INTERFACE; GAAS; CBR4;
D O I
10.1007/s10854-017-7770-0
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An extensive photoreflectance (PR) and photoluminescence (PL) study is done on an undoped n-type and p-type InAlAs metalorganic vapor phase epitaxy (MOVPE) grown layers on Fe-doped semi-insulating (SI)-InP substrates. A p-type doping with doping concentration of (1.57 x 10(18) cm(-3)) at a growth temperature of 560 A degrees C and V/III ratio of 50 is achieved. Photoluminescence (PL) spectra show a significant improvement in peak intensity of the type II transition for the Mg-doped InAlAs sample proving a better quality of the interface. Moreover, the abundant narrow satellite peaks of X-ray diffraction and the reciprocal space mapping recorded in the vicinity of (004) using high resolution X-ray diffraction (HRXRD) demonstrate a good quality of interfaces. Besides, photoreflectance spectroscopy (PR) at room temperature is useful to experimentally establish the valence-band splitting, a band-gap energy of InP substrate and InAlAs layers. A good correlation between experimental results was obtained.
引用
收藏
页码:18221 / 18227
页数:7
相关论文
共 24 条
[1]   MG DOPING OF INP AND INGAAS GROWN BY METALORGANIC MOLECULAR-BEAM EPITAXY USING BIS-CYCLOPENTADIENYL MAGNESIUM [J].
ABERNATHY, CR ;
WISK, PW ;
PEARTON, SJ ;
REN, F .
APPLIED PHYSICS LETTERS, 1993, 62 (03) :258-260
[2]   Optical study of inverted interface in InP/InAlAs/InP structures grown by MOCVD [J].
Borgi, K ;
Hjiri, M ;
Hassen, F ;
Maaref, H ;
Souliere, V ;
Monteil, Y .
MICROELECTRONIC ENGINEERING, 2000, 51-2 :299-308
[3]   Photoreflectance spectroscopy for the study of GaAsSb/InP heterojunction bipolar transistors [J].
Bru-Chevallier, C ;
Chouaib, H ;
Arcamone, J ;
Benyattou, T ;
Lahreche, H ;
Bove, P .
THIN SOLID FILMS, 2004, 450 (01) :151-154
[4]   OPTICAL-PROPERTIES OF IN1-XGAXP1-YASY, INP, GAAS, AND GAP DETERMINED BY ELLIPSOMETRY [J].
BURKHARD, H ;
DINGES, HW ;
KUPHAL, E .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (01) :655-662
[5]   Optimization of InAlAs buffers for growth of GaAs-based high indium content InGaAs photodetectors [J].
Chen, X. Y. ;
Gu, Y. ;
Zhang, Y. G. ;
Xi, S. P. ;
Guo, Z. X. ;
Zhou, L. ;
Li, A. Z. ;
Li, Hsby. .
JOURNAL OF CRYSTAL GROWTH, 2015, 425 :346-350
[6]   BERYLLIUM DOPING IN GA0.47IN0.53AS AND AL0.48IN0.52AS GROWN BY MOLECULAR-BEAM EPITAXY [J].
CHENG, KY ;
CHO, AY ;
BONNER, WA .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (07) :4672-4675
[7]   Optically in-situ monitored growth of carbon doped InAlAs by LP-MOVPE using CBr4 [J].
Decobert, J. ;
Lagay, N. ;
Thevenard, B. .
JOURNAL OF CRYSTAL GROWTH, 2008, 310 (23) :4813-4817
[8]   Influence of semi-insulating InP substrates on InAlAs epilayers grown by molecular beam epitaxy [J].
Dong, HW ;
Zhao, YW ;
Zeng, YP ;
Jiao, JH ;
Li, JM ;
Lin, LY .
JOURNAL OF CRYSTAL GROWTH, 2003, 250 (3-4) :364-369
[9]   Comprehensive study of Cp2Mg p-type doping of InP with MOVPE growth technique [J].
Ezzedini, M. ;
Zeydi, I. ;
El Kazzi, S. ;
Jiang, S. ;
Guo, W. ;
Sfaxi, L. ;
M'ghaieth, R. ;
Maaref, H. ;
Merckling, C. .
JOURNAL OF ALLOYS AND COMPOUNDS, 2015, 651 :344-349
[10]   Optical study of direct interface in InP/InAlAs/InP double heterostructures grown by MOCVD [J].
Hellara, J ;
Hassen, F ;
Maaref, H ;
Souliere, V ;
Monteil, Y .
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2003, 17 (1-4) :229-231