Effect of Film Thickness on the Piezoelectric Properties of Lead Zirconate Titanate Thick Films Fabricated by Aerosol Deposition

被引：33

作者：

Han, Guifang ^{[1
]}

Ryu, Jungho ^{[1
]}

Yoon, Woon-Ha ^{[1
]}

Choi, Jong-Jin ^{[1
]}

Hahn, Byung-Dong ^{[1
]}

Park, Dong-Soo ^{[1
]}

机构：

[1] KIMS, Funct Ceram Grp, Chang Won 641831, Gyeongnam, South Korea

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 2011年 / 94卷 / 05期

关键词：

SOL-GEL; DIELECTRIC-BREAKDOWN; ORIENTATION CONTROL; PZT; CERAMICS; ACTUATOR; DESIGN; SENSOR;

D O I：

10.1111/j.1551-2916.2010.04276.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Lead zirconate titanate (PZT) thick films with uniformly dispersed submicrometer pores were successfully fabricated on platinized silicon substrates with various thicknesses ranging from 1 mu m to over 100 mu m by aerosol deposition. Mixed powders of PZT and polyvinylidene fluoride (PVDF) were deposited for initial fabrication of composite films. After burn-out of the PVDF phase from the composite films during postannealing processing at 700 degrees C, uniformly dispersed submicrometer pores capable of relaxing the residual stress were generated in the PZT thick films. The dielectric and piezoelectric properties were improved with increasing film thickness due to the minimization of the interfacial clamping effect.

引用

页码：1509 / 1513

页数：5

共 30 条

[1] Piezoelectric properties and poling effect of Pb(Zr, Ti)O3 thick films prepared for microactuators by aerosol deposition [J].

Akedo, J ;

Lebedev, M .

APPLIED PHYSICS LETTERS, 2000, 77 (11) :1710-1712

[2] Room temperature impact consolidation (RTIC) of fine ceramic powder by aerosol deposition method and applications to microdevices [J].

Akedo, Jun .

JOURNAL OF THERMAL SPRAY TECHNOLOGY, 2008, 17 (02) :181-198

[3] Thickness dependence of electrical properties of PZT films deposited on metal substrates by laser-assisted aerosol deposition [J].

Baba, So ;

Tsuda, Hiroki ;

Akedo, Jun .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2008, 55 (05) :1009-1016

[4] DIELECTRIC, FERROELECTRIC, AND PIEZOELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE THICK-FILMS ON SILICON SUBSTRATES [J].

CHEN, HD ;

UDAYAKUMAR, KR ;

CROSS, LE ;

BERNSTEIN, JJ ;

NILES, LC .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (07) :3349-3353

[5] Dielectric breakdown strength in sol-gel derived PZT thick films [J].

Chen, HD ;

Udayakumar, KR ;

Gaskey, CJ ;

Cross, LE .

INTEGRATED FERROELECTRICS, 1997, 15 (1-4) :89-98

[6] Preparation of highly dense PZN-PZT thick films by the aerosol deposition method using excess-PbO powder [J].

Choi, Jong-Jin ;

Jang, Joo-Hee ;

Hahn, Byung-Dong ;

Park, Dong-Soo ;

Yoon, Woon-Ha ;

Ryu, Jungho ;

Park, Chan .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2007, 90 (11) :3389-3394

[7] Preparation and characterization of piezoelectric ceramic-polymer composite thick films by aerosol deposition for sensor application [J].

Choi, Jong-Jin ;

Hahn, Byung-Dong ;

Ryu, Jungho ;

Yoon, Woon-Ha ;

Lee, Byoung-Kuk ;

Park, Dong-Soo .

SENSORS AND ACTUATORS A-PHYSICAL, 2009, 153 (01) :89-95

[8] Electroceramic thick film fabrication for MEMS [J].

Dorey, RA ;

Whatmore, RW .

JOURNAL OF ELECTROCERAMICS, 2004, 12 (1-2) :19-32

[9] PZT thick films for sensor and actuator applications [J].

Gebhardt, Sylvia ;

Seffner, Lutz ;

Schlenkrich, Falko ;

Schoenecker, Andreas .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2007, 27 (13-15) :4177-4180

[10] DIELECTRIC BREAKDOWN OF POROUS CERAMICS [J].

GERSON, R ;

MARSHALL, TC .

JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) :1650-1653

← 1 2 3 →