Pulsed DC sputtered DLC based nanocomposite films: controlling growth dynamics, microstructure and frictional properties

被引：6

作者：

Shaha, K. P. ^{[1
]}

Pei, Y. T. ^{[1
]}

Chen, C. Q. ^{[1
]}

de Hosson, J. Th M. ^{[1
]}

机构：

[1] Univ Groningen, Dept Appl Phys, Mat Innovat Inst M2i, NL-9747 AG Groningen, Netherlands

来源：

MATERIALS TECHNOLOGY | 2011年 / 26卷 / 01期

关键词：

Dynamic roughening; Smoothing; Ultralow friction; DLC; Nanocomposite; Pulsed DC sputtering; DIAMOND-LIKE CARBON; COATINGS; DEPOSITION; SURFACES;

D O I：

10.1179/175355511X12941605982064

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Surface smoothness of diamond-like carbon based thin films becomes a crucial property for developing nearly frictionless protective coatings. Surface roughness and the dynamic growth behaviour of TiC/a-C nanocomposite films, deposited by non-reactive pulsed DC (p-DC) sputtering of graphite targets, were studied using atomic force microscopy and cross-sectional scanning electron microscopy. Upon increasing the intensity of concurrent ion impingement by raising the frequency of p-DC sputtering, a transition from dynamic roughening to dynamic smoothing was revealed, leading to a transition from a strong columnar to a columnar free microstructure. It was shown that smooth films can be deposited on initial rough surfaces at a higher pulse frequency (350 kHz). Also dense, tough, ultrasmooth and ultralow friction TiC/a-C: H nanocomposite films were successfully deposited on industrial polished steel substrates by reactive p-DC sputtering of Ti targets at 350 kHz frequency in an argon/acetylene atmosphere.

引用

页码：15 / 19

页数：5

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