An electromagnetic scanning mirror integrated with blazed grating and angle sensor for a near infrared micro spectrometer

被引：30
作者：
Zhou, Ying [1 ,2 ]
Wen, Quan [1 ,2 ,3 ]
Wen, Zhiyu [1 ,2 ]
Huang, Jian [1 ,2 ]
Chang, Fei [1 ,2 ]
机构：
[1] Chongqing Univ, Key Lab Fundamental Sci Micro Nanodevice & Syst T, Chongqing 400044, Peoples R China
[2] Chongqing Univ, Microsyst Res Ctr, Chongqing 400044, Peoples R China
[3] Fraunhofer Inst Elect Nano Syst ENAS, D-09131 Chemnitz, Germany
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2017年 / 27卷 / 12期
基金：
中国国家自然科学基金;
关键词：
scanning grating mirror; angle sensor; closed-loop control; NIR micro spectrometer; OPTICAL COHERENCE TOMOGRAPHY; ELECTROTHERMAL MICROMIRROR; MEMS; SPECTROSCOPY; RANGE;
D O I：
10.1088/1361-6439/aa85cd
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work presents an electromagnetic scanning mirror integrated with blazed grating and an angle sensor for a near infrared micro spectrometer. This device is fabricated on an aluminum coated 7.9 degrees off-oriented (1 1 1) silicon substrate by utilizing the micro-electro-mechanical systems (MEMS) technology. The proposed MEMS electromagnetic scanning grating mirror not only provides high diffraction efficiency by integrating blazed grating, but also realizes the closed-loop control of the scanning angle by designing an angle sensor during the mirror scanning. Finally, in order to verify the effectiveness of this proposed device, the near infrared micro spectrometer is presented. The use of this MEMS electromagnetic scanning grating mirror allows the near infrared micro spectrometer to span a spectral range of 800 nm-1800 nm accurately. Based on this configuration, the near infrared micro spectrometer is extremely simple and only one single InGaAs photodetector is achieved, instead of a detector array.
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页数：6
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