Influence of magnets' phyllotactic arrangement in cluster magnetorheological effect finishing process

被引：10

作者：

Nie Meng ^{[1
,2
]}

Cao Jianguo ^{[1
,2
]}

Liu Yueming ^{[1
,2
]}

Li Jianyong ^{[1
,2
]}

机构：

[1] Beijing Jiaotong Univ, Sch Mech Elect & Control Engn, Beijing 100044, Peoples R China

[2] Minist Educ, Key Lab Vehicle Adv Mfg Measuring & Control Techn, Beijing 100044, Peoples R China

来源：

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2018年 / 99卷 / 5-8期

关键词：

MRF polishing; Cluster; Phyllotactic arrangement; Polishing efficiency; Wafer flatness; RESIDUAL-STRESS; MRF;

D O I：

10.1007/s00170-018-2603-8

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The application of bionic research results to practical engineering can have some unexpected consequences. In this research, a cluster magnetorheological effect finishing method based on phyllotactic pattern that combines the arrangement of sunflower seeds on a plate, and the magnetic arrangement of magnetorheological finishing is proposed. By studying the combination of phyllotactic angle, magnetic pole direction and process parameters, such as the speed ratio and the eccentricity, several types of magnet arrangements that can obtain higher polishing efficiency and better wafer flatness are proposed. A method for the evaluation of the influence of the arrangement on the polishing effect is also proposed. Furthermore, a method for solving the interaction problem of the magnetic field generated from multiple magnets is discussed.

引用

页码：1699 / 1712

页数：14

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