Miniature uncooled infrared sensitive detectors for in vivo biomedical applications

被引:1
作者
Datskos, PG [1 ]
Demos, SG [1 ]
Rajic, S [1 ]
机构
[1] Univ Tennessee, Knoxville, TN 37996 USA
来源
BIOMEDICAL SENSING AND IMAGING TECHNOLOGIES, PROCEEDINGS OF | 1998年 / 3253卷
关键词
infrared detection; photon detector; thermal detector; in vivo; temperature mapping;
D O I
10.1117/12.308020
中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
Broadband infrared (IR) radiation detectors have been developed using miniature, inexpensive, mass produced microcantilevers capable of detecting temperature differences as small as 10(-6) K. Microcantilevers made out of semiconductor materials with dimensions of 50 to 200 mu m long, 10 to 30 mu m wide and 0.4 to 4 mu m thick, undergo bending when exposed to IR radiation and can be used either as uncooled photon or thermal detectors. Mounted on a probe 1 mm in diameter a number of microcantilevers can be accommodated in the working channel of existing endoscopes for in vivo proximity focus measurements inside the human body.
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收藏
页码:94 / 100
页数:7
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